Microcrystalline Silicon Thin-Films Prepared By Rf Reactive Magnetron Sputter-Deposition

AuthID
P-001-FZJ
5
Author(s)
FERREIRA, JA
·
DASILVA, MF
Tipo de Documento
Article
Year published
1995
Publicado
in VACUUM, ISSN: 0042-207X
Volume: 46, Número: 12, Páginas: 1385-1390 (6)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0029600563
Wos: WOS:A1995RU41800007
Source Identifiers
ISSN: 0042-207X
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