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Characterization of Zno Films Prepared by de Reactive Magnetron Sputtering at Different Oxygen Partial Pressures

AuthID
P-001-GKN

Author(s)

MENG, LJ

DOSSANTOS, MP

Tipo de Documento

Article

Year published

1995

Publicado

in VACUUM, ISSN: 0042-207X

Volume: 46, Número: 8-10, Páginas: 1001-1004 (4)

Conference

4Th European Vacuum Conference (Evc-4)1St Swedish Vacuum Meeting (Svm-1), Date: JUN 13-17, 1994, Location: UPPSALA, SWEDEN, Patrocinadores: Royal Swedish Acad Sci, Swedish Board Tech & Ind Dev, Swedish Res Council Engn Sci, Fisons Instruments, IUVSTA, Leybold, Nordiska Balzers AB, Balzers AG, Balzers Pfeiffer AG, Swedish Nat Sci Res Council, Int Sci Fdn, Swedish Vacuum Soc, Uppsala Univ, City Uppsala

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