Study Of Multilayer Substrate Surface-Roughness Using Rbs With Improved Depth Resolution

AuthID
 P-001-JE1
5
Author(s)
DASILVA, MF
·
PASZTI, F
·
SZILAGYI, E
Tipo de Documento
Article
Year published
1994
Publicado
in NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, ISSN: 0168-583X
Volume: 94, Número: 3, Páginas: 266-270 (5)
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Publication Identifiers
SCOPUS: 2-s2.0-0001299648
Wos: WOS:A1994PR78900014
Source Identifiers
ISSN: 0168-583X
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