Compact Xuv Excimer Radiation Sources and Their Application

AuthID
P-00F-RTQ
4
Author(s)
Wieser, J
·
Ulrich, A
1
Editor(es)
Tarasenko V.F.Mayer G.V.Petrash G.G.
Tipo de Documento
Proceedings Paper
Year published
2004
Publicado
in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X
Volume: 5483, Páginas: 297-304
Conference
Atomic and Molecular Pulsed Lasers V, Date: 15 September 2003 through 19 September 2003, Location: Tomsk, Patrocinadores: Russian Academy of Sciences;Siberian Branch of the Russian Academy of Sciences;International Science and Technology Center (Russia);Tomsk Innovation Center of Laser Technology (Russia);Surgut State University (Russia);et al
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Publication Identifiers
SCOPUS: 2-s2.0-3042588661
Source Identifiers
ISSN: 0277-786X
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