Fabrication of Rr-P3Ht-Based Tfts Using Low-Temperature Pecvd Silicon Nitride Passivation

AuthID
 P-00F-T5D
5
Author(s)
Koul, S
·
Li, F
·
Sazonov, A
·
Nathan, A
Tipo de Documento
Proceedings Paper
Year published
2005
Publicado
in Materials Research Society Symposium Proceedings, ISSN: 0272-9172
Volume: 871, Páginas: 311-316
Conference
2005 Mrs Spring Meeting, Date: 28 March 2005 through 1 April 2005, Location: San Francisco, CA
Indexing
Scopus®
Publication Identifiers
SCOPUS: 2-s2.0-34249948538
Source Identifiers
ISSN: 0272-9172
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