Characterization of High-Resistivity Polycrystalline Silicon Substrates for Wafer-Level Packaging and Integration of Rf Passives

AuthID
P-00G-A76
6
Author(s)
Polyakov, A
·
Sinaga, SM
·
2
Editor(es)
Osvald, J; Hascik, S
Tipo de Documento
Proceedings Paper
Year published
2004
Publicado
in ASDAM 2004: The Fifth International Conference on Advanced Semiconductor Devices and Microsystems
Páginas: 227-230 (4)
Conference
5Th International Conference on Advanced Semiconductor Devices and Microsystems, Date: OCT 17-21, 2004, Location: Smolenice, SLOVAKIA, Patrocinadores: Slovak Acad Sci, Inst Elect Engn, Slovak Univ Technol, Fac Elect Engn& Informat Technol, MIcroelectron Dept, European Comm Represented Commiss European Comm Res Directorate Gen, IEEE Elect Dev Soc
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Publication Identifiers
Wos: WOS:000228828900053
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