Bi-Directional Extended Range Parallel Plate Electrostatic Actuator Based on Feedback Linearization

AuthID
P-00G-C13
8
Author(s)
Moreira, EE
·
Alves, FS
·
Dias, RA
·
Costa, M
·
Fonseca, H
·
Gaspar, J
·
Tipo de Documento
Proceedings Paper
Year published
2015
Publicado
in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), ISSN: 1084-6999
Volume: 2015-February, Número: February, Páginas: 1036-1039
Conference
2015 28Th Ieee International Conference on Micro Electro Mechanical Systems, Mems 2015, Date: 18 January 2015 through 22 January 2015, Patrocinadores: IEEE Robotics and Automation Society
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-84931045038
Source Identifiers
ISSN: 1084-6999
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