The Influence Of Oxygen Partial-Pressure On The Properties Of Dc Reactive Magnetron-Sputtered Titanium-Oxide Films

AuthID
P-001-MWR
2
Author(s)
Tipo de Documento
Article
Year published
1993
Publicado
in APPLIED SURFACE SCIENCE, ISSN: 0169-4332
Volume: 68, Número: 3, Páginas: 319-325 (7)
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-0027625927
Wos: WOS:A1993LL29200005
Source Identifiers
ISSN: 0169-4332
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