Structural, Mechanical and Piezoelectric Properties of Polycrystalline Aln Films Sputtered on Titanium Bottom Electrodes

AuthID
 P-00G-QCJ
8
Author(s)
Pətru, M
·
Isac, L
·
Oncioiu, G
·
Cristea, D
·
Munteanu, D
Tipo de Documento
Proceedings Paper
Year published
2015
Publicado
in Applied Surface Science, ISSN: 0169-4332
Volume: 354, Páginas: 267-278
Indexing
Scopus®
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-84944280632
Source Identifiers
ISSN: 0169-4332
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