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High Rate Growth of Nanocrystalline Diamond Films Using High Microwave Power and Pure Nitrogen/Methane/Hydrogen Plasma

AuthID
P-00G-T6W

Author(s)

Tang, CJ

Fernandes, AJS

Granada, M

Leitao, JP

Pereira, S

Jiang, XF

Pinto, JL

Ye, H

Tipo de Documento

Article

Year published

2015

Publicado

in VACUUM, ISSN: 0042-207X

Volume: 122, Páginas: 342-346 (5)

Conference

Joint Meeting on the 13Th European Vacuum Conference / 7Th European Topical Conference on Hard Coatings / 9Th Iberian Vacuum Meeting, Date: SEP 08-12, 2014, Location: Aveiro, PORTUGAL

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Publication Identifiers

DOI: 10.1016/j.vacuum.2015.03.021

SCOPUS: 2-s2.0-84945491415

Wos: WOS:000364732200018

Source Identifiers

ISSN: 0042-207X

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High Rate Growth of Nanocrystalline Diamond Films Using High Microwave Power and Pure Nitrogen/Methane/Hydrogen Plasma

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High Rate Growth of Nanocrystalline Diamond Films Using High Microwave Power and Pure Nitrogen/Methane/Hydrogen Plasma

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