Study of Tungsten Sputtered Films with Low Nitrogen Content

AuthID
P-00H-65Y
3
Author(s)
Castanho, J
·
Vieira, M
Tipo de Documento
Article
Year published
1994
Publicado
in Vacuum, ISSN: 0042-207X
Volume: 45, Número: 10-11, Páginas: 1051-1053
Indexing
Publication Identifiers
Source Identifiers
ISSN: 0042-207X
Export Publication Metadata
Info
At this moment we don't have any links to full text documens.