The Influence of Oxygen Partial Pressure and Total Pressure (O2 + Ar) on the Properties of Tin Oxide Films Prepared by Dc Sputtering

AuthID
 P-00H-665
2
Author(s)
dos Santos, M
Tipo de Documento
Article
Year published
1994
Publicado
in Vacuum, ISSN: 0042-207X
Volume: 45, Número: 12, Páginas: 1191-1195
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ISSN: 0042-207X
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