Zinc Oxide Films Prepared by Dc Reactive Magnetron Sputtering at Different Substrate Temperatures

AuthID
 P-00H-667
3
Author(s)
dos Santos, M
Document Type
Article
Year published
1994
Published
in Vacuum, ISSN: 0042-207X
Volume: 45, Issue: 1, Pages: 19-22
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ISSN: 0042-207X
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