Influence of Deposition Conditions on the Adhesion of Sputter- Deposited W-C-(Co) Films

AuthID
P-00H-6YB
2
Author(s)
Tipo de Documento
Article
Year published
1991
Publicado
in Materials Science and Engineering: A, ISSN: 09215093
Volume: 140, Páginas: 631-638 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-85041142541
Source Identifiers
ISSN: 09215093
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