Tantalum Oxynitride Thin Films: Mechanical Properties and Wear Behavior Dependence on Growth Conditions

AuthID
 P-00H-E1Z
6
Author(s)
Cristea, D
·
Crisan, A
·
Munteanu, D
·
Apreutesei, M
·
Tipo de Documento
Article
Year published
2014
Publicado
in Surface and Coatings Technology, ISSN: 0257-8972
Volume: 258, Páginas: 587-596
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Publication Identifiers
SCOPUS: 2-s2.0-85027928889
Source Identifiers
ISSN: 0257-8972
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