Influence of a Dc Grid on Silane R.f. Plasma Properties

AuthID
P-00H-FBP
Tipo de Documento
Article
Year published
2002
Publicado
in Vacuum, ISSN: 0042-207X
Volume: 64, Número: 3-4, Páginas: 387-392
Indexing
Publication Identifiers
Source Identifiers
ISSN: 0042-207X
Export Publication Metadata
Info
At this moment we don't have any links to full text documens.