Two-Dimensional Electromagnetic Model of a Microwave Plasma Reactor Operated by an Axial Injection Torch

AuthID
 P-00H-M8K
2
Author(s)
Álvarez, R
·
Tipo de Documento
Article
Year published
2007
Publicado
in J. Appl. Phys. - Journal of Applied Physics, ISSN: 0021-8979
Volume: 101, Número: 10, Páginas: 103303
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ISSN: 0021-8979
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