Wave-To-Plasma Power Transfer in Magnetically Assisted High-Frequency Discharges in Argon

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 P-00H-MDD
1
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Article
Year published
1995
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in J. Appl. Phys. - Journal of Applied Physics, ISSN: 0021-8979
Volume: 78, Número: 8, Páginas: 4850
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ISSN: 0021-8979
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