Electron Energy Distributions and Excitation Rates in High-Frequency Argon Discharges

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P-00H-P66
2
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Article
Year published
1983
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in Journal of Physics D: Applied Physics - J. Phys. D: Appl. Phys., ISSN: 0022-3727
Volume: 16, Número: 12, Páginas: 2471-2483
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ISSN: 0022-3727
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