Fast Eedf Probe Measurement in Surface Wave Discharges Using a Dc Coupled Stepped Signal

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 P-00H-PN6
1
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Article
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1995
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in Plasma Sources Sci. Technol. - Plasma Sources Science and Technology, ISSN: 0963-0252
Volume: 4, Número: 1, Páginas: 86-93
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ISSN: 0963-0252
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