High-Resolution Mems Inclinometer Based on Pull-In Voltage

AuthID
P-00H-T1B
5
Author(s)
Alves, FS
·
Dias, RA
·
Gaspar, J
·
Tipo de Documento
Article
Year published
2015
Publicado
in Journal of Microelectromechanical Systems, ISSN: 1057-7157
Volume: 24, Número: 4, Páginas: 931-939
Indexing
Publication Identifiers
SCOPUS: 2-s2.0-85028229738
Source Identifiers
ISSN: 1057-7157
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