Thin Films Residual Stress Measurement by Optical Profilometry

AuthID
 P-00H-X3H
1
Author(s)
3
Editor(es)
Asundi, Anand K.; Osten, Wolfgang; Varadan, Vijay K.
Tipo de Documento
Proceedings Paper
Year published
2001
Publicado
in Advanced Photonic Sensors and Applications II
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