Design of Magnetrons for Dc Sputtering

AuthID
P-001-T17
1
Author(s)
Document Type
Article
Year published
1989
Published
in VACUUM, ISSN: 0042-207X
Volume: 39, Issue: 7-8, Pages: 717-721 (5)
Indexing
Publication Identifiers
Scopus: 2-s2.0-0024943909
Wos: WOS:A1989AP86900023
Source Identifiers
ISSN: 0042-207X
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