Hydrogenated Thin-Film Silicon Semiconductors Produced By A 2 Consecutive Decomposition And Deposition Chamber System

AuthID
 P-001-T1A
7
Author(s)
GUIMARAES, L
·
SANTOS, M
·
MACARICO, A
·
CARVALHO, N
·
Tipo de Documento
Article
Year published
1989
Publicado
in VACUUM, ISSN: 0042-207X
Volume: 39, Número: 7-8, Páginas: 789-790 (2)
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Scopus®
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Publication Identifiers
SCOPUS: 2-s2.0-0024915137
Wos: WOS:A1989AP86900038
Source Identifiers
ISSN: 0042-207X
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