Energy Deposition and Substrate Heating During Magnetron Sputtering

AuthID
 P-00J-CH9
3
Author(s)
Guimarães, F
·
Teixeira, V
Document Type
Article
Year published
1993
Published
in Vacuum, ISSN: 0042-207X
Volume: 44, Issue: 8, Pages: 809-813
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ISSN: 0042-207X
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