Hydrogenated Silicon Nitride Sinx:h Deposited by Dielectric Barrier Discharge for Photovoltaics

AuthID
 P-00K-0MW
7
Author(s)
Massines, F
·
Lelievre, JF
·
Bazinette, R
·
Vallade, J
·
Pouliquen, S
Tipo de Documento
Article
Year published
2016
Publicado
in PLASMA PROCESSES AND POLYMERS, ISSN: 1612-8850
Volume: 13, Número: 1, Páginas: 170-183 (14)
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Publication Identifiers
SCOPUS: 2-s2.0-84955334619
Wos: WOS:000368454200013
Source Identifiers
ISSN: 1612-8850
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