Digital Platform for Wafer-Level Mems Testing and Characterization Using Electrical Response

AuthID
 P-00K-XAX
7
Author(s)
Brito, N
·
Ferreira, C
·
Alves, F
·
Gaspar, J
·
Tipo de Documento
Article
Year published
2016
Publicado
in SENSORS, ISSN: 1424-8220
Volume: 16, Número: 9, Páginas: 1553 (15)
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Publication Identifiers
SCOPUS: 2-s2.0-84988977580
Wos: WOS:000385527700206
Source Identifiers
ISSN: 1424-8220
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