Low-Temperature Deposition of Nanocrystalline Diamond Films on Silicon Nitride Substrates Using Distributed Antenna Array Pecvd System

AuthID
 P-00M-8Z6
6
Author(s)
Baudrillart, B
·
Benedic, F
·
Melouani, AS
·
Achard, J
Tipo de Documento
Article
Year published
2016
Publicado
in PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, ISSN: 1862-6300
Volume: 213, Número: 10, Páginas: 2575-2581 (7)
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Publication Identifiers
SCOPUS: 2-s2.0-84978042706
Wos: WOS:000388321500005
Source Identifiers
ISSN: 1862-6300
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