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Advanced Run-To-Run Controller in Semiconductor Manufacturing with Real-Time Equipment Condition Apc: Advanced Process Control; Am: Advanced Metrology

AuthID
P-00P-VBB

Author(s)

Yang, WT

Blue, J

Roussy, A

Reis, M

Pinaton, J

Tipo de Documento

Proceedings Paper

Year published

2018

Publicado

in 2018 29TH ANNUAL SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE (ASMC) in Advanced Semiconductor Manufacturing Conference and Workshop-Proceedings, ISSN: 1078-8743

Páginas: 346-352 (7)

Conference

29Th Annual Semi Advanced Semiconductor Manufacturing Conference (Asmc), Date: APR 30-MAY 03, 2018, Location: Saratoga Springs, NY

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Metadata
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Publication Identifiers

DOI: 10.1109/asmc.2018.8373161

SCOPUS: 2-s2.0-85048864111

Wos: WOS:000448893500075

Source Identifiers

ISSN: 1078-8743

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