Publicações

Sub-Micron Mems Accelerometer with Handle-Layer Patterning for Damping Enhancement Using Time Transduction

AuthID
P-00R-1E8

Author(s)

Garcia, IS

Tipo de Documento

Proceedings Paper

Year published

2019

Publicado

in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Páginas: 2045-2048

Conference

20Th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors Xxxiii, Transducers 2019 and Eurosensors Xxxiii, Date: 23 June 2019 through 27 June 2019, Patrocinadores: Electron Devices Society (EDS);Hahn-Schickard;IEEE

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