Publicações

Thin-Film Silicon Resonators on Ultra-Flexible 10 Micrometer-Thick Polyimide Substrates

AuthID
P-00R-1E9

Author(s)

Pestana, TG

Pinto, RMR

Dias, RA

Martins, M

Chu, V

Gaspar, J

Conde, JP

Tipo de Documento

Proceedings Paper

Year published

2019

Publicado

in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Páginas: 2539-2542

Conference

20Th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors Xxxiii, Transducers 2019 and Eurosensors Xxxiii, Date: 23 June 2019 through 27 June 2019, Patrocinadores: Electron Devices Society (EDS);Hahn-Schickard;IEEE

Indexing