Publicações

Small Size and Highly Sensitive Differential Mems Accelerometer Based on Double-Ended Tuning Fork Resonators

AuthID
P-00R-1F3

Author(s)

Moreira, EE

Kuhlmann, B

Gaspar, J

Rocha, LA

Tipo de Documento

Proceedings Paper

Year published

2019

Publicado

in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Páginas: 602-605

Conference

20Th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors Xxxiii, Transducers 2019 and Eurosensors Xxxiii, Date: 23 June 2019 through 27 June 2019, Patrocinadores: Electron Devices Society (EDS);Hahn-Schickard;IEEE

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