Publicações

A Large-Volume N-2-Ar Microwave Plasma Source Based on Surface Waves

AuthID
P-000-7RW

Author(s)

Ferreira, CM

Tatarova, E

Henriques, J

Dias, FM

Editor(es)

Guerassimov N.Karpozov D.

Tipo de Documento

Article

Year published

2004

Publicado

in VACUUM, ISSN: 0042-207X

Volume: 76, Número: 2-3, Páginas: 343-346 (4)

Conference

13Th International Summer School on Vacuum, Electron and Ion Technologies, Date: SEP 15-19, 2003, Location: Varna, BULGARIA, Patrocinadores: Bulgarian Acad Sci, Inst Elect, Inst Ion Beam Phys & Mat Res, Res Ctr Rossendorf, FZR, Fdn Evrika

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