Multi-Frequency Resonance Behaviour of a Si Fractal Nems Resonator

AuthID
P-00S-1T7
5
Author(s)
Tzanov, V
·
Llobet, J
·
Torres, F
·
Perez Murano, F
·
Document Type
Article
Year published
2020
Published
in NANOMATERIALS, ISSN: 2079-4991
Volume: 10, Issue: 4
Indexing
Publication Identifiers
Scopus: 2-s2.0-85083827039
Wos: WOS:000539577200214
Source Identifiers
ISSN: 2079-4991
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