A Novel Optimization Method to Automated Wet-Etch Station Scheduling in Semiconductor Manufacturing Systems

AuthID
 P-002-HR1
3
Author(s)
Aguirre, AM
·
Mendez, CA
·
Tipo de Documento
Article
Year published
2011
Publicado
in COMPUTERS & CHEMICAL ENGINEERING, ISSN: 0098-1354
Volume: 35, Número: 12, Páginas: 2960-2972 (13)
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Publication Identifiers
SCOPUS: 2-s2.0-80052845471
Wos: WOS:000296871800031
Source Identifiers
ISSN: 0098-1354
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