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Formation of Irregular Morphology on Nanostructured Surface by Gas Cluster Ion Beam
AuthID
P-00S-MGY
7
Author(s)
Pelenovich, V
·
Zeng, XM
·
Zuo, WB
·
Tolstogouzov, A
·
Korobeishchikov, N
·
Fu, DJ
·
Yang, B
Document Type
Article
Year published
2020
Published
in
VACUUM,
ISSN: 0042-207X
Volume: 182
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Wos
®
Scopus
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Metadata
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Publication Identifiers
DOI
:
10.1016/j.vacuum.2020.109705
Scopus
: 2-s2.0-85089531562
Wos
: WOS:000582757100036
Source Identifiers
ISSN
: 0042-207X
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