Formation of Irregular Morphology on Nanostructured Surface by Gas Cluster Ion Beam

AuthID
P-00S-MGY
7
Author(s)
Pelenovich, V
·
Zeng, XM
·
Zuo, WB
·
Tolstogouzov, A
·
Korobeishchikov, N
·
Yang, B
Document Type
Article
Year published
2020
Published
in VACUUM, ISSN: 0042-207X
Volume: 182
Indexing
Publication Identifiers
Scopus: 2-s2.0-85089531562
Wos: WOS:000582757100036
Source Identifiers
ISSN: 0042-207X
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