N-2-H(2)Capacitively Coupled Radio-Frequency Discharges at Low Pressure. Part I. Experimental Results: Effect of the H(2)Amount on Electrons, Positive Ions and Ammonia Formation

AuthID
 P-00S-S3M
8
Author(s)
Chatain, A
·
Jimenez Redondo, M
·
Vettier, L
·
Guaitella, O
·
Carrasco, N
·
Marques, L
·
Cernogora, G
Tipo de Documento
Article
Year published
2020
Publicado
in PLASMA SOURCES SCIENCE & TECHNOLOGY, ISSN: 0963-0252
Volume: 29, Número: 8, Páginas: 085019 (20)
Indexing
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Scopus®
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Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85091145772
Wos: WOS:000570489600001
Source Identifiers
ISSN: 0963-0252
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