Effect of Peak Power in Deep Oscillation Magnetron Sputtering on Film Properties

AuthID
 P-00T-HPG
3
Author(s)
Ferreira, F
·
Tipo de Documento
Article in Press
Year published
2021
Publicado
in JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, ISSN: 1059-9495
Volume: 30, Número: 6, Páginas: 3912-3924 (13)
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Publication Identifiers
SCOPUS: 2-s2.0-85101161980
Wos: WOS:000618610300001
Source Identifiers
ISSN: 1059-9495
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