Sputtering of Silicon by Atomic and Cluster Bismuth Ions: An Influence of Projectile Nuclearity and Specific Kinetic Energy on the Sputter Yield

AuthID
 P-00T-NBD
7
Author(s)
Mazarov, P
·
Ieshkin, AE
·
Belykh, SF
·
Korobeishchikov, NG
·
Pelenovich, VO
·
Fu, DJ
Tipo de Documento
Article
Year published
2021
Publicado
in VACUUM, ISSN: 0042-207X
Volume: 188, Páginas: 110188 (4)
Indexing
Wos®
Scopus®
Crossref®5
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-85102595178
Wos: WOS:000649679200005
Source Identifiers
ISSN: 0042-207X
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