Simulating the Effect of Ar+Energy Implantation on the Strain Propagation in Algan

AuthID
P-00T-SJN
5
Author(s)
Document Type
Article
Year published
2021
Published
in Journal of Physics D: Applied Physics, ISSN: 0022-3727
Volume: 54, Issue: 24, Pages: 245301
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Publication Identifiers
Scopus: 2-s2.0-85103846330
Source Identifiers
ISSN: 0022-3727
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