Re-Orientation of Graphoepitaxial Fluorite Films Towards Small-Index Crystallographic Planes

AuthID
 P-00W-83H
4
Author(s)
Mozhaev, PB
·
Hansen, JB
·
Jacobsen, CS
2
Editor(es)
Rudenko,KV;Lukichev,VF
Tipo de Documento
Proceedings Paper
Year published
2022
Publicado
in Proceedings of SPIE - The International Society for Optical Engineering, ISSN: 0277-786X
Volume: 12157
Conference
14Th International Conference on Micro- and Nano-Electronics 2021, Icmne 2021, Date: 4 October 2021 through 8 October 2021, Patrocinadores: JSC Molecular Electronics Research Institute;NIX Company;TechnoInfo Ltd.
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Publication Identifiers
SCOPUS: 2-s2.0-85125667440
Source Identifiers
ISSN: 0277-786X
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