A New Regime for High Rate Growth of Nanocrystalline Diamond Films Using High Power and Ch4/H-2/N-2/O-2 Plasma

AuthID
 P-002-TE1
9
Author(s)
Gu, LP
·
Ye, H
·
Jiang, XF
·
Tipo de Documento
Article
Year published
2011
Publicado
in DIAMOND AND RELATED MATERIALS, ISSN: 0925-9635
Volume: 20, Número: 3, Páginas: 304-309 (6)
Conference
4Th International Conference on New Diamond and Nano Carbons, Date: 2010, Location: Suzhou, PEOPLES R CHINA
Indexing
Wos®
Scopus®
Crossref®11
Google Scholar®
Publication Identifiers
SCOPUS: 2-s2.0-79551567724
Wos: WOS:000289539900007
Source Identifiers
ISSN: 0925-9635
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