Auto-Calibration of Capacitive Mems Accelerometers Based on Pull-In Voltage

AuthID
 P-002-TEP
5
Author(s)
Dias, RA
·
Cretu, E
·
Mol, L
·
Tipo de Documento
Article
Year published
2011
Publicado
in MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, ISSN: 0946-7076
Volume: 17, Número: 3, Páginas: 429-436 (8)
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Publication Identifiers
SCOPUS: 2-s2.0-84856294112
Wos: WOS:000289442600014
Source Identifiers
ISSN: 0946-7076
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