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Shape and Thickness Measurements Using a Reconstruction Method for Linear Sensor Microscopy Based on Improvement of Lateral Resolution Isotropy

AuthID
P-002-Z9A

Author(s)

Macedo, MP

Correia, CMBA

Editor(es)

Lehmann, PH; Osten, W; Gastinger, K

Tipo de Documento

Proceedings Paper

Year published

2011

Publicado

in OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII in Proceedings of SPIE, ISSN: 0277-786X

Volume: 8082

Conference

Conference on Optical Measurement Systems for Industrial Inspection Vii, Date: MAY 23-26, 2011, Location: Munich, GERMANY, Patrocinadores: SPIE

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Publication Identifiers

DOI: 10.1117/12.889408

SCOPUS: 2-s2.0-84861040331

Wos: WOS:000295076900111

Source Identifiers

ISSN: 0277-786X

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Shape and Thickness Measurements Using a Reconstruction Method for Linear Sensor Microscopy Based on Improvement of Lateral Resolution Isotropy

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Shape and Thickness Measurements Using a Reconstruction Method for Linear Sensor Microscopy Based on Improvement of Lateral Resolution Isotropy

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