David Galipeau
AuthID: R-006-R2F
1
TITLE: Computer-aided development of a magnetron source with high target utilization Full Text
AUTHORS: Qi Hua Fan; David Galipeau; Li Qin Zhou ; Gracio, JJ ;
PUBLISHED: 2011, SOURCE: VACUUM, VOLUME: 85, ISSUE: 8
AUTHORS: Qi Hua Fan; David Galipeau; Li Qin Zhou ; Gracio, JJ ;
PUBLISHED: 2011, SOURCE: VACUUM, VOLUME: 85, ISSUE: 8