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TITLE: Silicon Effect on the Hardness of r.f. Sputtered B-C:Si Amorphous Films  Full Text
AUTHORS: Cristina Louro ; Joao C Oliveira ; Manish Chhowalla; Albano Cavaleiro ;
PUBLISHED: 2009, SOURCE: 11th International Conference on Plasma Surface Engineering in PLASMA PROCESSES AND POLYMERS, VOLUME: 6, ISSUE: SUPPL. 1
INDEXED IN: Scopus WOS CrossRef: 3