Tomas Nyberg
AuthID: R-007-2V3
1
TITLE: Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing Full Text
AUTHORS: Tomas Kubart; Tomas Polcar; Oliver Kappertz; Nuno Parreira; Tomas Nyberg; Soren Berg; Albano Cavaleiro ;
PUBLISHED: 2007, SOURCE: PLASMA PROCESSES AND POLYMERS, VOLUME: 4, ISSUE: SUPPL.1
AUTHORS: Tomas Kubart; Tomas Polcar; Oliver Kappertz; Nuno Parreira; Tomas Nyberg; Soren Berg; Albano Cavaleiro ;
PUBLISHED: 2007, SOURCE: PLASMA PROCESSES AND POLYMERS, VOLUME: 4, ISSUE: SUPPL.1
