A. Hemamouche
AuthID: R-00F-GY8
1
TITLE: FIB patterning of dielectric, metallized and graphene membranes: A comparative study Full Text
AUTHORS: Hemamouche, A; Morin, A; Bourhis, E; Toury, B; Tarnaud, E; Mathe, J; Guegan, P; Madouri, A; Lafosse, X; Ulysse, C; Gullet, S; Patriarche, G; Auvray, L; Montel, F; Wilmart, Q; Placais, B; Yates, J; Gierak, J;
PUBLISHED: 2014, SOURCE: MICROELECTRONIC ENGINEERING, VOLUME: 121
AUTHORS: Hemamouche, A; Morin, A; Bourhis, E; Toury, B; Tarnaud, E; Mathe, J; Guegan, P; Madouri, A; Lafosse, X; Ulysse, C; Gullet, S; Patriarche, G; Auvray, L; Montel, F; Wilmart, Q; Placais, B; Yates, J; Gierak, J;
PUBLISHED: 2014, SOURCE: MICROELECTRONIC ENGINEERING, VOLUME: 121
