J.e Bour?E
AuthID: R-00G-1AP
1
TITLE: Deposition of silicon nitride thin films by hot-wire CVD at 100 °C and 250 °C Full Text
AUTHORS: Alpuim, P; L.M Gonçalves; E.S Marins; T.M.R Viseu; Ferdov, S; J.E Bourée;
PUBLISHED: 2009, SOURCE: Thin Solid Films, VOLUME: 517, ISSUE: 12
AUTHORS: Alpuim, P; L.M Gonçalves; E.S Marins; T.M.R Viseu; Ferdov, S; J.E Bourée;
PUBLISHED: 2009, SOURCE: Thin Solid Films, VOLUME: 517, ISSUE: 12
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