L. Boufendi
AuthID: R-00G-5WJ
1
TITLE: Capacitively coupled radio-frequency discharges in nitrogen at low pressures Full Text
AUTHORS: Alves, LL ; Marques, L ; Pintassilgo, CD ; Wattieaux, G; Et Es sebbar; Berndt, J; Kovacevic, E; Carrasco, N; Boufendi, L; Cernogora, G;
PUBLISHED: 2012, SOURCE: PLASMA SOURCES SCIENCE & TECHNOLOGY, VOLUME: 21, ISSUE: 4
AUTHORS: Alves, LL ; Marques, L ; Pintassilgo, CD ; Wattieaux, G; Et Es sebbar; Berndt, J; Kovacevic, E; Carrasco, N; Boufendi, L; Cernogora, G;
PUBLISHED: 2012, SOURCE: PLASMA SOURCES SCIENCE & TECHNOLOGY, VOLUME: 21, ISSUE: 4
